OpAL Oxford Instruments Plasma Technology System Manual
3.14 Glove box
The N2 purged glove box, shown in Fig 3-36, is located on the chamber to provide a
nitrogen environment for use against moisture and oxygen-sensitive gases.
The glove box incorporates:
a manual substrate loader
a nitro
gen flow meter to regulate the flow of gas into the chamber
an extraction port.
Fig 3-36: Glove box
3.15 Residual gas analyser
An MKS Vision 1000-C residual gas analyser (RGA) can be fitted on the process chamber
to monitor the levels of various gas species during process runs. This equipment can also
be used to monitor plasma cleaning operations.
Refer to the manufacturer’s manual in Section 3 of this manual for a complete description
of this equipment.
Description
Issue 1: August 07 Page 3-46 of 46 Printed: 07 August 2009 07:42
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