Oxford Instruments OpAL - Page 65

System Manual Oxford Instruments Plasma Technology OpAL
ALD valves
mounted behind panel
Precursor cabinet
door
Fig 3-9: Console right-hand view
Precursor 2
Precursor 3
Precursor 4
ALD valves
Fig 3-10: Console right- hand view (door open)
Description
Printed: 07 August 2009 07:42 Page 3-9 of 46 Issue 1: August 07