OpAL
Open Load Atomic Layer Deposition System
System Manual
Works Order No.: 94-417919
Customer:
Università di Pisa
Volume 1: Operation and Maintenance Manual
This manual, Volume 1, is one of a series for the machine as follows:
Volume 1 Operation and Maintenance Manual
Volume 2 System Drawings
Volume 3 OEM Manuals
Notes:
1. Please regard this manual as part of the system.
2. Ensure that any amendment received is incorporated in the text.
Oxford Instruments Plasma Technology
Yatton, Bristol, BS49 4AP
Tel: +44 1934 837000
Fax: +44 1934 837001
Issue 1: July 2010
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