OpAL Oxford Instruments Plasma Technology System Manual
Fig 3-33: Precursor delivery layout in OpAL
Vapour draw is used for delivering high vapour pressure chemicals, category B. This
method is used when processing at pressures < vapour pressure of the source chemical
at room temperature. Bubbling is used to deliver low vapour pressure chemicals, category
C. Gases are delivered directly into the chamber.
Delivery method
Precursor Category Heating of source pot
Vapour draw B No
Vapour draw / Bubbling Intermediate between B and
C
Yes
Bubbling C Yes
Precursors are supplied in bubblers which are pre-fitted with two manual valves – one on
the inlet and one on the outlet side. It is imperative that during precursor selection,
correct precursor, amount (max. 100 g), bubbler types and temperature rating of the
manual valves are specified. Precursors may be purchased from Air Products, Akzo Nobel,
Epichem, Sigma Aldrich, Rohm and Haas, Strem Chemicals, etc.
Description
Issue 1: August 07 Page 3-42 of 46 Printed: 07 August 2009 07:42
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