Oxford Instruments OpAL - Venting the system; Manual process run

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WARNING
CONTACT WITH TOXIC GASES CAN CAUSE DEATH OR SERIOUS INJURY.
BEFORE VENTING THE PROCESS CHAMBER, ALWAYS ENSURE THAT THE SYSTEM IS ADEQUATELY
PURGED AND PUMPED.
To ensure the process chamber is safe to open and residuals are pumped away as required, an
automatic pump/purge cycle is incorporated into the system. This cycle can be pre-set to be
performed from a minimum of five to a maximum of 100 cycles
Do not vent a system which has used toxic gases unless the system has been adequately
pumped first.
For example: Gases having Threshold Limit Values (TLVs) of 1ppm or below, e.g.
Chlorine, require at least 20 minutes pumping before venting.
After venting, there may still be residual gases in the process chamber. Consider wearing
suitable personal protection, e.g. a respirator.
To vent the system, use the following steps:
1) Ensure that the Pump Control page is displayed (if necessary, select the System
Menu, then the Pumping option).
2) Select the STOP button, then the VENT button for the process chamber. Note that
the vent sequence is controlled by a timer to allow time for the turbo pumps to be
purged.
When the ‘Vent Time Left’ timer has decremented to zero, the process chamber has been
vented.
Do not attempt to open the process chamber lid until the vacuum switch has changed status,
i.e. to its high-pressure status (In this condition, on the Pump Control page the vacuum status
field will display ‘FAULT’).
The vent valve is left on for a period after the chamber opens, to ensure that venting is fully
completed, even if lid opening is actuated early.
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1) Pump the system down as detailed in sub-section 5.6.6, page 5-18.
2) Check that the system has pumped down to base pressure. (The process chamber
message panel should display ‘Base Pressure reached’).
3) Select the Process Menu, then the Chamber 1 option. The Process Control page is
displayed.
4) Enter the parameters required for the manual process run, e.g. Step Time, RF
generator power, table temperature, chamber pressure, and gas demands etc.
5) Click the START button. (Note that if this button is not active, the chamber has not
reached base pressure.) The process will commence.
Operating Instructions
Printed: 06 November 2007 09:42 Page 5-19 of 60 Generic (OpAL Plasma) Issue 1: Oct. 07