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NOTES:
a) You can pause the process at any time by selecting the PAUSE button. This will
cause the Step Time and the plasma power to stop with the current step time
indicated. Re-starting the process will cause the process to continue from the time it
was paused. If, during the pause period, you change any of the process parameters,
e.g. gas demand, pressure etc., you must press the START button for the changes
made to come into effect, this will cause the step timer to continue from the time it
was paused.
b) You can stop the process at any time; the message ‘Process Complete’ will be
displayed, if required, you can then run the same or another process.
When the ‘Process Complete’ message is displayed, the system can be vented (see sub-section
5.6.7 page 5-19), or another manual process run carried out.
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An automatic process run as described in this sub-section can be carried out by a user logged
on as a Manager. See sub-section 5.6.10, page 5-21 for details of a single button automatic
process run which can be carried out by any user.
1) Pump the system down as detailed in sub-section 5.6.6, page 5-18.
2) Check that the system has pumped down to base pressure. (The process chamber
message panel should display ‘Base Pressure reached’).
3) Select the Process Menu, then the Recipe option. The recipe page is displayed.
4) Select the Chamber button.
5) Select the Load button then select the required recipe from the displayed list. Click
OK.
6) To run the loaded recipe, select the Run button. The recipe will be automatically run
and the Chamber 1 page will be displayed to allow you to monitor its progress.
NOTES:
a) You can pause the process at any time by selecting the PAUSE button. This will
cause the Step Time and the plasma power to stop with the current step time
indicated. Re-starting the process will cause the process to continue from the time it
was paused. If, during the pause period, you change any of the process parameters,
e.g. gas demand, pressure etc., you must press the START button for the changes
made to come into effect, this will cause the step timer to continue from the time it
was paused.
b) You can stop the process at any time; the message ‘Process Complete’ will be
displayed, if required, you can then run the same or another process.
When the ‘Process Complete’ message is displayed, the system can be vented (see sub-section
5.6.7 page 5-19), or another process run carried out.
Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07 Page 5-20 of 60 Printed: 06 November 2007 09:42
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