lé^i lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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This Appendix gives information about the precursor pot fitted to the lé^i system.
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The basic bubbling layout is shown in Fig 2-1.
To chamber
VCR
VCR
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Switching
Ar bubbler
500 sccm
E
Fig 2-1: Basic bubbling layout
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1) Before connecting a source pot, ensure that the lines have been pumped.
2) Connect the pot in accordance with local health and safety measures and MSDS
3) Connect the inlet and outlet – DO NOT TURN THEM ON YET
4) Pump out atmosphere which is trapped during connection of inlet and outlet valves of the
source pot:
i) The inlet is pumped out via the Exhaust ALD valve, E, this valve needs to be turned
on with Switching valve S1 (S1 is paired with D1 and control is provided by D1)
ii) S1 and D1 will come on at the same time and this will clear the trapped
atmosphere
iii) Close S1 and D1, flow Ar from bubbler mfc to clear any residual air in the bubbling
line
Precursor Source Pot
Issue 1: September 07 Page 2 of 20 Printed: 7-Oct-07, 12:13
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