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iv) Open D1 and flow Argon from the purge MFC to clear any residual air in the
delivery line
v) Pump out inlet and outlet lines – MANUAL INLET AND OUTLET VALVES ARE STILL
SHUT
5) Degassing
Precursors are filled under inert gas at around 2 bar. This space has to be evacuated.
i) Turn on D1 for 1 minute
ii) Gradually, open the outlet valve, note pressure rise does not trip the CM gauge.
iii) Shut manual valve
iv) Repeat steps ii) and iii) above until there is no pressure rise
v) Turn off D1
vi) Pot is now degassed
6) Open the inlet manual valve
7) Start processing in bubbling mode.
Precursor Source Pot
Printed: 7-Oct-07, 12:13 Page 3 of 20 Issue 1: September 07
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