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The AMU comprises:
a) an input section with a type N coaxial connector, and a coupler giving ‘out of match’
error signals when the reflected power is greater than 1% of the forward power.
b) an RF section containing two motor-driven variable capacitors, together with a coil
where necessary.
c) a DC bias / Peak to peak, set by local switch, signal path. (Only fitted to AMUs used
for matching to a powered wafer table.)
d) an electronic control board, which uses the error signals to drive the variable
capacitors towards match.
OIPT Automatch Unit
Issue 6: September 05 Page 4 of 20 Printed: 16-Nov-07, 9:26
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