ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
Health and Safety
Printed: 14-Jul-10, 7:20
Page 1-1 of 4 Issue 01: July 10
1 Health and Safety
1 Health and Safety ................................................................................................................... 1-1
1.1 Health and safety for the ozone delivery system..................................................................1-2
1.2 Hazard information for ozone .............................................................................................1-2
1.2.1 Charecteristics of ozone...............................................................................................1-2
1.2.2 Potential health effects of ozone ..................................................................................1-2
1.3 Additional hazard information for the ozone delivery system ..............................................1-3
1.3.1 Weight .........................................................................................................................1-3
1.3.2 High voltage.................................................................................................................1-3
1.4 Safety features ....................................................................................................................1-3
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