Oxford Instruments OpAL - Appendix R: Rotameter data

System Manual Oxford Instruments Plasma Technology All OIPT Systems
Rotameter Data
Printed: 5-Jun-09, 9:58 Page R 1 of 6 Issue 2: October 04
Appendix R Rotameter data
Rotameters ................................................................................................................................ 2
2
1
1.1
Rotameter types..................................................................................................................... 2
1.2 Setting the required purge flow rate....................................................................................... 3
1.3 Flow versus scale reading graphs ........................................................................................... 4
Appendix R Rotameter data – Issue Change Record Sheet ........................................................... 5
Fig 1: Typical rotameter .................................................................................................................... 2