Oxford Instruments OpAL - Flow versus scale reading graphs

All OIPT Systems Oxford Instruments Plasma Technology System Manual
Rotameter Data
Issue 2: October 04 Page R 4 of 6 Printed: 5-Jun-09, 9:58
1.3 Flow versus scale reading graphs
G/GAS/ROT/050 (Tube No: A125-3)
0
0
123456
10
20
30
60
Scale Reading
Flow
(sccm)
A125-3
40
50
G/GAS/ROT/25L (Tube No: A250-4)
0
0
123456
5
10
15
30
Scale Reading
Flow
(slpm)
A250-4
20
25
G/GAS/ROT/40L (Tube No: A250-6)
0
0
123456
10
20
30
40
50
Flow
(slpm)
Scale Reading
A250-6
G/GAS/ROT/900 (Tube No: A250-1)
0
0
123456
1
2
Scale Reading
Flow
(slpm)
50-1
3
4
5
A2
G/GAS/ROT/800 (Tube No: A125-7)
0
0
123456
100
200
300
400
500
Flow
600
Scale Reading
(sccm)
A125-7
900
700
800