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The basic vapour draw layout is shown in Fig 3-1.
To chamber
VCR
VCR
Unheated TMA or H2O pot
pre-fitted with manual
valves. Only the outlet is
connected
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Fig 3-1: Basic vapour draw layout
Precursor Source Pot
Printed: 7-Oct-07, 12:13 Page 11 of 20 Issue 1: September 07
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