Oxford Instruments OpAL - Page 260

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Precursor purge
1) Ensure Purge valve is turned on; see Fig 2-8
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Ar bubbler
500 sccm
Switching
E
Fill
Fig 2-8: Step 7 Bubbling - purging of precursor
Precursor Source Pot
Issue 1: September 07 Page 10 of 20 Printed: 7-Oct-07, 12:13