Oxford Instruments OpAL - Page 259

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lé^i
OKNKNKT píÉé=T=Emçí=éêÉé~ê~íáçå=Ñçê=ÄìÄÄäáåÖF=
Precursor pulse
1) Ensure Switching and Dose valves are turned on; see Fig 2-7.
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Ar bubbler
500 sccm
Switching
E
Fill
Fig 2-7: Step 7 Bubbling - delivery of precursor
Precursor Source Pot
Printed: 7-Oct-07, 12:13 Page 9 of 20 Issue 1: September 07