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1) Degas source pot; see Fig 2-6.
2) Turn on D valve for one minute and slowly open the outlet valve to evacuate the inert
gas in the pot overhead space.
3) Note the pressure rise in the chamber.
4) Repeat Steps 2) and 3) above until pressure in the chamber is constant.
5) Do not turn on the manual valves yet!
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Ar bubbler
500 sccm
Switching
E
Fig 2-6: Step 6 (Pot preparation for bubbling)
Precursor Source Pot
Issue 1: September 07 Page 8 of 20 Printed: 7-Oct-07, 12:13
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