Oxford Instruments OpAL - Appendix A: Measurement of radio frequency and microwave emissions

System Manual Oxford Instruments Plasma Technology Plasmalab and Ionfab
Appendix A Measurement of radio frequency and microwave
emissions
1.
Scope of testing ................................................................................................................. 2
2. Method of testing...............................................................................................................2
3. Acceptable exposure standards .......................................................................................... 3
4. System design .................................................................................................................... 3
Measurement of RF & Microwave Emissions
Printed: 5-Jun-09, 9:58 Page 1 of 4 Issue 2: December 01