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The typical process operating ranges are:
Total gas flows = 50 to 500 sccm. The maximum flow depends on type of pumps fitted to the system i.e.
their maximum flow capacity, their pumping performance, and the required operating pressure. If you
need to use a low pressure, you may have to limit the flow rate to achieve this.
Pressure = 100 to 1000mTorr. The pressure is set by gas flow and depends on the process. The system
base pressure is measured simply by using the CM gauge, hence base pressures are typically a few mTorr.
The exact value is mainly determined by the offset of the CM gauge zero (this is usually set slightly
positive by a few mTorr to ensure a sensible reading, since a negative offset will always read zero).
RF power = typically 100W to 250W. A plasma may not strike easily for low power levels for certain
gases. You will need to check this and adjust the process accordingly, since operating the system without
a plasma could cause damage.
Temperature is limited by the operating range of the electrode, up to 400 °C and jacket heaters ranging
from 30 °C to 200 °C.
NOTES:
(A) The time taken to reach the base pressure will depend on whether the chamber has recently been
vented to atmosphere, the cleanliness of the chamber walls and if the chamber has been baked.
(B) Operating with a high reflected power (>5% of forward power) is not advised, as this will cause
damage to the matching unit or RF generator. To reduce the high reflected power, adjust the
process parameters or re-tune the matching unit.
Process Information (Information contained in this document is confidential)
Issue 1: August 07 Page 6 of 14 Printed: 08 October 2007 11:00
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