Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-18 of 24 Printed:06 April 2010, 09:32
1.4.13.7
Ensure that all personnel who may be expected to have access to the system during an
emergency, such as firemen, paramedics etc. are familiar with the location of th
circuit breakers and valves.
e main
to
1.4.13.9
tamination presented by smoking, some chemicals when burnt
generate carcinogenic or toxic compounds.
igned to be operated with all panels and covers in place.
romagnetic compatibility requirements. OIPT do not
recommend operating the system unless all panels and covers are fixed in place.
1.5 Warning and advisor
During manufacture, warnin ar i
hazards and components, which should not be operat
relevant manual. Typical labels and their meanings are as follows:
Label
1.4.13.8
Whenever any component is returned to Oxford Instruments Plasma Technology or
any of their agents, it must be accompanied by copies of the Goods Return Form (QCF
60).
Never smoke or eat in the 'clean room' or where gases are stored. In addition to the fire
risks and particulate con
1.4.13.10 OIPT systems have been des
These panels form part of a barrier to protect the operator from exposure to hazards
within the system. Note that some hazards are either present continuously, but some
hazards only appear in a fault condition. The panels should also be in place to ensure
that the system meets elect
y labels
g and advisory labels e attached to the system to
ed or maintained without first reading the
ndicate potential
OIPT Part Number Meaning Location
94-G-SUN-ART-055
94-G-SUN-ART-056
hysical injury
from RF radiation or from
touching components
within the labelled
RF shielding.
RF generator
cover.
RF coaxial cable.
Danger of p
equipment.
94-G-SUN-ART-054
Danger of trapping limbs,
fingers etc. in the labelled
equipment.
Upper chamber.
Upper loadlock.
94-G-SUN-ART-053
ry Danger of physical inju
from toppling.
Precursor cabinet.
94-G-G-SUN-ART-
084
from toppling system, if
frame not fitted. loadlock.
Warns of physical injury NGP-B front
frame below
94-G-SUN-ART-061
Warns of physical injury
from lifting heavy panel.
exterior panels.
NGP-B loadlock
lower panel.
Crystal Flex
94-G-G-SUN-ART-
085
Warns of physical injury
from lifting heavy
loadlock.
NGP-B Loadlock.
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