Oxford Instruments PlasmalabSystem100 - Page 19

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 19 of 24 Issue 10: February 11
Part Number
Fluid
Usable Temperature
Range
Recommended
Application
94-G-WTR-SUN-909
Thermal G
-30 to 80°C
FL601.
FP51 when fitted to
systems with
electrically heated
tables and the
automatic liquid
nitrogen changeover
unit (ACU).
94-G-WTR-SUN-903
Thermal H5
-50 to 105°C
All other systems.
The following accessories are available for heater/chillers:
Part Number
Description
Application
94-G-G-WTR-SUN-921
Solenoid isolation valves
Fit these valves when the chiller
is located below the main
system.
Temperature range is -10°C to
+130°C.
94-100-12-23-1BL
LN2 Automatic Changeover Unit (ACU)
To automatically switch
between chiller fluid operation
and liquid nitrogen or
electrically heating of the table.