Oxford Instruments PlasmalabSystem100 - RF Enable Interlock Chain Details

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 21 of 24 Issue 10: February 11
RF enable interlock chain details are given in Table 1; Refer to drawing 94-SE00A26865
(PC2003 interface schematic).
INTERLOCK
DEVICE
PCB
input
PCB1
LED
Link out
Comments
Vacuum
Switch
Vacuum Switch
BLK17
11
NONE
Pressure below 600 mBar
Hoist /Lid
a) Air cylinder
switch/microswitc
h
or
b) Guardmaster
Switch N/O Switch
BLK18
BLK19
12
13
NONE
Lid closed or hoist down. Enables
end point laser via JP51
Primary
pump
running
Current monitor in
Power Box
JP44
6
15
Interlock disabled if an
independent/dry pump fitted
Process
pressure
gauge on
scale
Capacitance
Manometer (e.g.
Baratron™)
JP16
5
NONE
Analogue input below 11.5V.
Switches comparator U5.
Spare
interlock 1
External Voltage Free
contact or 24V DC
input to PCB
JP52
14
Can be
bypassed
using
LK19
Customer-supplied device. Volt
free contact JP52 pins 1 and 4.
OR
24V DC input JP52 pin 4.
Spare
interlock 2
Or
Load lock
valve
External Voltage Free
contact
Inter-chamber valve
must be shut
JP53
15
20
Customer-supplied device
Or
Used on 100 and 133 systems
Process
pump purge
Gas Flow Switch at
Primary Pump
JP55
16
LK21A
Fit LK21B if fitted
Table 1: RF enable interlock chain details
If above satisfied, then 24V is at BLK20, 21 & 22 pin 1. This enables the K4 contactor to
supply power to the RF Generator.