DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severest injuries up to
death.
►
Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►
Make sure that the power supply pack meets the requirements in accordance with IEC 61010
and IEC 60950.
►
Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►
Install a mains disconnection device according to SEMI-S2.
►
Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Danger to life from electric shock due to improperly performed installation
The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal
situations arise due to unsafe or incorrectly installation when reaching into the device.
►
Ensure that the system is safely integrated into an emergency off safety circuit.
►
Do not carry out any unauthorized modifications or changes to the device.
Risks during operation
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►
Always keep the mains connection freely accessible so you can disconnect it at any time.
Risks during maintenance
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the
vacuum pump is at a standstill. There is a danger to life from electric shock when making contact with
live components.
►
Before performing all work, switch off the main switch.
►
Wait until the vacuum pump comes to a standstill (rotation speed =0).
►
Disconnect all connection cables.
►
Remove the mains plug from the device.
►
Secure the device against unintentional restarting.
Risks during troubleshooting
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►
Always keep the mains connection freely accessible so you can disconnect it at any time.
Safety
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