Polytec TMS-500 TopMap Pro.Surf - Optics

5-5
5 Technical Specifications
5.3.2 Optics
Characteristics
Long-term Drift caused by Warming-up of the Sensor Head
Vertical measurement range: 70 mm
Version
Max. size of area of
interest (AOI)
Pixel resolution
[mm x mm] [µm x µm]
Large field of
view
44.9 x 33.8
(corners clipped)
Lateral 28.2 x 28.2
Small field of view 22.8 x 17.2 Lateral 14.3 x 14.3
After switching on Long-term drift
[h] [nm/min]
0.25 80
0.5 70
150
230
320
410