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Polytec MSA-600 User Manual

Polytec MSA-600
99 pages
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Title
Operating Instructions
Micro System Analyzer
MSA-600
Sensor Head MSA-I-620
Front-End MSA-F-620
Controller MSA-E-600
Data Management System MSA-W-620
For MSA-600-X/MSA-600-U Systems

Table of Contents

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Polytec MSA-600 Specifications

General IconGeneral
Measurement PrincipleLaser Doppler Vibrometry
Optical Resolution1 µm
Laser Wavelength532 nm
Velocity Resolution0.02 µm/s
Displacement Resolution0.1 nm
Objective Lenses5x, 10x, 20x, 50x
CameraIntegrated high-resolution camera
ApplicationsMEMS
OutputsAnalog, digital
DimensionsVaries depending on configuration
WeightVaries with configuration
Frequency RangeDC to 25 MHz

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