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Contents
Contents
1 Safety Information 1-1
1.1 Information on Using these Operating Instructions ............................................................. 1-1
1.1.1 Warning Notices Used .............................................................................................. 1-1
1.1.2 Notices Used ........................................................................................................... 1-1
1.2 Mandatory Signs ................................................................................................................ 1-2
1.3 General Safety Information ................................................................................................ 1-2
1.3.1 Operating the Instrument Safely ............................................................................... 1-2
1.3.2 Intended Use ........................................................................................................... 1-2
1.3.3 User Qualification ..................................................................................................... 1-3
1.3.4 Ambient Conditions .................................................................................................. 1-3
1.3.5 Personal Protective Equipment (PPE) ...................................................................... 1-3
1.3.6 Cleaning ..................................................................................................................1-4
1.3.7 Installing Other Components .................................................................................... 1-4
1.3.8 Disposal ................................................................................................................... 1-4
1.4 Laser Safety ...................................................................................................................... 1-5
1.4.1 Important Warning Notices ....................................................................................... 1-5
1.4.2 Applicable Standards and Directives ........................................................................ 1-6
1.4.3 Equipment ................................................................................................................ 1-6
1.4.4 Information on Laser Class 3R ................................................................................. 1-6
1.4.5 Warning Labels on the Instrument ............................................................................ 1-7
1.5 Lamp Safety ...................................................................................................................... 1-9
1.5.1 Important Warning Notices ....................................................................................... 1-9
1.5.2 Applicable Standards and Directives ........................................................................ 1-9
1.5.3 Equipment ................................................................................................................ 1-9
1.5.4 Information on Risk Category 2 ................................................................................ 1-9
1.5.5 Warning Labels on the Instrument .......................................................................... 1-10
1.6 Electrical Safety ................................................................................................................1-11
1.6.1 Important Warning Notices ......................................................................................1-11
1.6.2 Important Notices ................................................................................................... 1-12
1.6.3 Applicable Standards and Directives ...................................................................... 1-12
1.6.4 Warning Labels on the Instrument .......................................................................... 1-13
1.7 Information on REACH Regulation ................................................................................... 1-13
2 Introduction 2-1
2.1 Area of Application ............................................................................................................. 2-1
2.2 System Summary ............................................................................................................... 2-1
2.3 MSA-600 Options ............................................................................................................... 2-2
2.4 Out-of-Plane-, In-Plane- and Topography Measurements ................................................... 2-3
2.5 Differential Measurements ................................................................................................. 2-3