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2 Introduction
2 Introduction
2.1 Area of Application
The MSA-600 Measurement System measures non-contact and non-
destructive movements in microsystems.
2.2 System Summary
The MSA-600 Measurement System essentially consists of the MSA-I-620
Sensor Head, the MSA-F-620 Front-End, the MSA-E-600 Controller, and the
MSA-W-620 Data Management System. The measurement system can be
supplemented by accessories that are available as an option, such as
different stands, adjusters, or tables. Interference objectives are available for
topography measurements and bright field objectives with various
magnifications for vibration measurements.
Figure 2.1: Summary of system components of the MSA-600 Measurement System, together with accessories
available as an option
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