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2 Introduction
2.4 Out-of-Plane-, In-Plane- and Topography Measurements
With its equipment and by using three software applications, the MSA-600
Measurement System can make a range of different measurements:
•
Out-of-plane measurements: The instrument can acquire measurements
perpendicular to the measurement plane on the basis of laser
interferometry and can display and evaluate them with the PSV software.
You will find information on interferometric measurements and the theory
of the Polytec Scanning Vibrometers (PSV) in the PSV Theory Manual.
•
Topography measurements: Using the MSA-A-TMS option, the instrument
can acquire 3D surface structures of rough and reflective structures and
display and analyze them with the TMS software.
You will find information on topography measurements (TMS) based on
the principle of white light interferometry in the appendix of the TMS
software manual.
•
In-plane measurements (only MSA-600-X): Using the MSA-A-PMA option,
the instrument can acquire movements in the measurement plane on the
basis of video microscopy, stroboscopy, and using digital image
processing. The acquired data can then be displayed and analyzed with
the PMA software.
You will find information on stroboscopy and on image processing with the
Planar Motion Analyzer (PMA) in the appendix of the PMA software
manual.
2.5 Differential Measurements
With the MSA-A-DIF option, the sensor head is also equipped for making
differential measurements. The reference beam of the laser interferometer
does not remain in the sensor head but is also aimed at the measurement
object. This allows the differences of the out-of-plane movements of the
object to be detected between the measurement point and reference point.
Interferences, such a uniform movements of the entire object, are thereby
suppressed in the measurement.
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