R301 RF POWER SUPPLY OPERATOR’S MANUAL
To Send Description/Comment
Select VOLTAGE
CONTROL mode
DR<cr> Sets the Analog Interface connector
FEEDBACK signal as the feedback
source for regulating the RF output
level.
Response: <prompt><cr>
Select POWER CONTROL
mode
IR<cr> Sets the unit’s internal power sensor as
the feedback source for regulating the
RF output level.
Response: <prompt><cr>
Select FORWARD POWER
leveling
DL<cr> Regulates the RF output level based
solely on the forward power feedback
signal.
Response: <prompt><cr>
Select LOAD POWER
leveling
EL<cr> Regulates the RF output power based on
the net power delivered to the load.
(forward power – reflected power = net
power)
Response: <prompt><cr>
Enable PULSE mode +P<cr> Enables Process Pulsing
Response: <prompt><cr>
Disable PULSE mode -P<cr> Disables Process Pulsing
Response: <prompt><cr>
Enable RF Output G<cr> Enable the RF Output
Response: <prompt><cr>
Disable RF Output S<cr> Disable the RF Output
Response: <prompt><cr>
Set the Power Setpoint XXXX_W<cr> XXXX is the desired power output, in
Watts. 1 to 4 digits.
Response: <prompt><cr>
Set the Voltage Setpoint XXXX_V<cr> XXXX is the desired output, in Volts. 1
to 4 digits.
Response: <prompt><cr>
Set the Process Pulse duty
cycle
XXX_D<cr> XXX is the process pulse duty cycle, 1to
100%, in 1 % increments. 1 to 3 digits.
Response: <prompt><cr>
Set the Process Pulse high
time
XXXX_HT<cr> XXXX is the process pulse high time, in
milliseconds. 1 to 4 digits.
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Seren IPS Inc.
6100130000 Rev. 0.05