NANYTE BEAM Manual
NANYTE BEAM Manual BM-001-A3 / V1.1a Page 11 of 33
distance is the distance from the bottom of the objective to the top of the sample. For the Nikon
20x objectives, the working distance is 1 mm means that the sample can potentially be driven
into the objectives. Caution should be exercised when focusing.
STAGE LEVEL KNOBS
The pair of micrometer screw knobs provide precision adjustment to achieve parallelism between
the sample plane and optics plane. If the sample stage is tilted, the laser beam may not be
focused on all points in a write field.
SAMPLE STAGE
Provides a flat surface to place the sample. The stage moves in y and z axes. The z axis is driven
by a stepper motor along with a piezoelectric actuator. The former provides coarse and long
range motion, while the piezoelectric actuator allows near-instantaneous positioning, which
allows for fast focusing. Each z-step corresponds to 150 nm.
BEAM ENGINE
Modular optics bench which can be removed for maintenance or upgrades. For more info, see
next section.
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