NANYTE BEAM Manual
NANYTE BEAM Manual BM-001-A3 / V1.1a Page 33 of 33
Troubleshooting
For any calibration procedure, ensure that the operator is trained and familiar with the
calibration procedure.
Symptom Action
Camera window is completely black. Turn on the LED on the main window.
Second layer alignment is more than 1
micron offset, despite the camera
overlay showing a perfect alignment.
Perform galvo position calibration.
Imperfect stitching between adjacent
write fields
Perform stepper calibration.
Unable to obtain desired resolution.
1. Perform focus offset calibration to find the
correct focus offset.
2. Reduce the exposure dose
3. Optimize photoresist development process
(time, molarity)
4. Use a thinner photoresist
Development is uneven across a
single write field.
1. Perform laser spatial power calibration.
2. Optimize photoresist development process
(time, molarity)
www.simtrum.com
To Previous Page
Loading...