NANYTE BEAM Manual
NANYTE BEAM Manual BM-001-A3 / V1.1a Page 4 of 33
Getting Started
Safety Precautions
The following safety precautions should be observed before using this product and any
associated instrumentation.
This product is intended for use by qualified personnel who recognize shock hazards and are
familiar with the standard lithography processes. Read and follow all installation, operation, and
maintenance information carefully before using the product. Refer to the user documentation for
complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty
may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of
equipment, for ensuring that the equipment is operated within its specifications and operating
limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in standard lithography
procedures and proper use of the equipment.
Only properly trained service personnel may perform installation and service procedures.
Exercise extreme caution when a shock hazard is present. The American National Standards
Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS,
42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is
present in any unknown circuit before measuring. Operators of this product must be protected
from electric shock at all times.
When installing equipment where access to the main power cord is restricted, such as rack
mounting, a separate main input power disconnect device must be provided in close proximity to
the equipment and within easy reach of the operator.
The equipment and accessories must be used in accordance with its specifications and operating
instructions, or the safety of the equipment may be impaired.
When fuses are used in a product, replace with the same type and rating for continued protection
against fire hazard.
The WARNING heading in the user documentation explains dangers that might result in personal
injury or death. Always read the associated information very carefully before performing the
indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the
equipment. Such damage may invalidate the warranty. Instrumentation and accessories shall not
be connected to humans.
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