NANYTE BEAM Manual
NANYTE BEAM Manual BM-001-A3 / V1.1a Page 3 of 33
Laser calibrations ........................................................................................................................... 30
PI curve ........................................................................................................................................ 30
Spatial power calibration ............................................................................................................ 30
Stage levelling ................................................................................................................................. 31
Focus calibration ............................................................................................................................ 31
Calibrating the autofocus ........................................................................................................... 31
Calibrating the laser beam spot focus offset ........................................................................... 32
Troubleshooting .................................................................................................................. 33
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