SIMTRUM NANYTE BEAM - Table of Contents; Contents

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NANYTE BEAM Manual

NANYTE BEAM Manual BM-001-A3 / V1.1a Page 2 of 33

Contents

Contents......................................................................................................................................... 2

Getting Started ...................................................................................................................... 4

Safety Precautions ............................................................................................................................ 4

Laser Safety ....................................................................................................................................... 5

Maintenance ...................................................................................................................................... 5

Contact Information .......................................................................................................................... 6

Packing List ....................................................................................................................................... 6

Unpacking and installation ............................................................................................................... 6

Product overview .............................................................................................................................. 6

Specifications .................................................................................................................................... 8

System requirements........................................................................................................................ 9

Power ............................................................................................................................................. 9

Location ......................................................................................................................................... 9

Front View........................................................................................................................................ 10

BEAM ENGINE ................................................................................................................................. 12

Back View ........................................................................................................................................ 13

XPLORER Main Window ................................................................................................................. 14

Camera Window .............................................................................................................................. 18

Keyboard/Mouse Shortcuts ........................................................................................................... 19

Patterning ........................................................................................................................... 20

Sample preparation and loading .................................................................................................... 20

Load GDS ......................................................................................................................................... 21

Load image files .............................................................................................................................. 23

Draw patterns .................................................................................................................................. 24

Alignment ........................................................................................................................................ 25

Exposure .......................................................................................................................................... 27

Sample Retrieval ............................................................................................................................. 27

Calibration ........................................................................................................................... 28

Galvo scanner position calibration ................................................................................................ 29

Stepper calibration .......................................................................................................................... 29