NANYTE BEAM Manual
NANYTE BEAM Manual BM-001-A3 / V1.1a Page 10 of 33
Front View
OBJECTIVES
Focuses the UV laser beam into a diffraction-limited spot to expose the resist. Objectives are
secured with standard screw thread. The table below summarizes the various objectives that is
compatible.
Objective
Theoretical
Resolution (nm)
Achievable
Linewidth (nm)
Write Field
(um)
Working
Distance (mm)
Nikon 20x 370 600 400 1
Nikon 10x 1100 1000 800 7.5
Nikon 4x 2750 3500 2000 30
The standard NANYTE BEAM is shipped with the Nikon 20x option. The theoretical resolution is
calculated from the numerical aperture of the objectives, while the achievable linewidth is
empirically determined from testing. The values listed are for reference and may greatly differ
(increased or even decreased) due to process parameters. The write field parameter determines
the maximum area on the substrate that can be exposed without moving the steppers. Working
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