4200A-SCS system overview
The 4200A-SCS is an automated system that provides I-V, pulsed I-V, and C-V characterization of
semiconductor devices and test structures. Its advanced digital sweep parameter analyzer combines
speed and accuracy for deep sub-micron characterization.
Tests are easily and quickly configured and executed from Clarius. Clarius is an application designed
and developed specifically for characterizing semiconductor devices and materials. Source and
measurement functions for a test are provided by up to eight source-measure units (SMUs). Test
capabilities are extended by support of a variety of external components.
Pulse source and measure tests can be provided by the 4225-PMU Ultra-fast IV pulse-measure card.
Tests requiring pulse source, but no corresponding pulse measurement, can use the 4220-PGU
pulse-only card. One typical configuration with pulse source-measure capability would be a
4200A-SCS system that consists of four SMUs, two 4225-PMUs and four 4225-RPMs. This system
would then have four SMUs and four Pulse IV channels (pulse source and measure), with the RPMs
allowing for switching between pulse and SMU test resources. The primary 4200A-SCS components
and typical supported external components are illustrated in the following figure.
Figure 1: 4200A-SCS summary
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