Series 613 OPERATION
984360EC Edition 12.08.2022 107/
Optimizing I-Gain
While optimizing I-Gain, the gas flow determined above has to be constant all the time.
Start with P-Gain set to half of the value found when optimizing P-Gain and set I-Gain to 1.0.
Keep the P-Gain constant.
Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition
from SP2 to SP1 results in a significant pressure over shoot or if the valve position does not stabilize,
I-Gain is too high. If the transition results in a slow asymptotical pressure rise and there is still a
constant deviation to SP2, the I-Gain is too low.
The optimal value for I-Gain is found if the transition from SP2 to SP1 result in just a slight pressure
over shoot, a stable valve position and the actual pressure matches SP2 exactly.
Example:
Check control performance over the whole control range with parameters above.
Required information for support:
• Go to ‘Tools / Create Diagnostic File’ in ‘Control Performance Analyzer’ and save file
• Pressure / flow / gas conditions to be controlled
• Chamber volume
• Pumping speed (l/s) and pump type (e.g. turbo pump)
• System description
• Problem description
Send diagnostic file with and all required information to tuning-support@vat.ch
To Next Page
Loading...
