VAT 613 Series

Series 613 OPERATION
984360EC Edition 12.08.2022 111/
149
6.3.5.2 Mode
Time
Unit: seconds
Time is constant, slope varies
Example: 2 sec
Slope
Unit: Pressure / seconds
Slope is constant, time varies
Example: 10mTorr/second
6.3.5.3 Type
Linear Logarithmic Exponential