VAT 650 Series - 3.9 Control Modes and 3.10 Pressure Control

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
280672EB
2010-12-15
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3.9 Position control
The valve position is directly controlled according to the position setpoint.
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «OUTPUT Buffer» for details)
1. In «OUTPUT Buffer» > « POSITION SETPOINT»
2. Select valid value
Select or enter position setpoint
3. In «OUTPUT Buffer» > «CONTROL MODE
SETPOINT»
4. Select [Position] (value = 2)
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
Local operation:
(‘Control View’ resp. ‘Control Performance Analyzer’)
Remote operation:
(Refer to chapter «OUTPUT Buffer» for details)
1. In «OUTPUT Buffer» > «PRESSURE
SETPOINT»
2. Select a valid value
Select or enter pressure setpoint
3. In «OUTPUT Buffer» > «CONTROL MODE
SETPOINT»
4. Select [Pressure] (value = 5)