Contents
12/304 TwisTorr 304 FS User Manual / 87-901-027-01
Instructions for Use 225
Safety Guideline for Turbomolecular Pumps 226
General Information 227
Storage 229
Preparation for installation 230
Installation 232
Pump Fixing 234
Use of TwisTorr 304 FS 235
Maintenance 237
Disposal 238
Technical Information 239
Description of the TwisTorr 304 FS 240
Technical Specification 247
TwisTorr 304 FS Outline 250
Interconnections 269
Soft Start 271
Inlet screen installation 272
Air Cooling Kit Installation 275
Water Cooling Kit Connection 277
Vent Accessories 280
Vibration Isolator Installation 284
Purge Valve Installation 285