Introduction 8200 Compressor
General Installation, Operation, and Service Instructions
8040353 Brooks Automation
1-2 Revision AA
General
The manual provides instructions for installing, operating and servicing the 8200
Compressor. This compressor is available in two versions: air-cooled, part number
8032549G001/G002 and water cooled, part number 803255G001/G002.
If you are installing or operating a Cryo-Torr or On-Board System you should also
have available the appropriate cryopump or refrigerator.
When you purchase a system, you will receive two manuals necessary for system
installation.
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