Brooks 8200 - Inspection

8200 Compressor
Installation, Operation, and Service Instructions
Brooks Automation 8040353
Revision AA
3-1
3 Inspection
Overview
This chapter details unpacking the compressor.
A High-Vacuum Pump or Refrigerator System is packaged in separate cartons for
each major component. An Installation, Operation, and Servicing Manual is included
in the carton for the component packaged in that carton.
Chapter Contents
The Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2