Brooks MFM - Page 8

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
8
⇒ Environmental errors
 - No gas ow detected
 - Power supply outside specication range
- Ambient temperature outside specied range high and
low ow alarms
• Digital communication, via Probus-DP referring to document
541-C-068-AAG
Section 1: Introduction