EBARA EV-SA20 - Page 15

P.14
PM10U
EBARA
CORPORATION
3.2.1 Vacuum and Exhaust Piping................................................................ 28
3.3 Electrical Wiring ............................................................................................ 29
3.3.1 Power Supply Wiring ............................................................................ 29
3.3.2 Control Signal Wiring ........................................................................... 33
4. Operation Panel ............................................................................................... 36
4.1 Operation Panel Outline ............................................................................... 36
4.2 Operation Panel Display .............................................................................. 39
5. Operation .......................................................................................................... 41
5.1 Before Starting .............................................................................................. 41
5.2 START / STOP ............................................................................................... 42
5.3 Pump speed control mode .......................................................................... 44
5.4 Operation when momentarily power failure happens .............................. 45
5.5 Gas Ballast .................................................................................................... 46
6. Maintenance and Inspection .......................................................................... 47
6.1 Routine Inspection ....................................................................................... 47
6.2 Vacuum and Exhaust Piping ....................................................................... 47
6.3 Lubrication Oil .............................................................................................. 48
6.4 Maintenance Parts List ................................................................................ 50
6.5 List of Wastes During Maintenance ........................................................... 50
6.6 Repair and Service ....................................................................................... 51
6.7 Overhaul ........................................................................................................ 51
7. Storage / Disposal ........................................................................................... 51
7.1 Storage ........................................................................................................... 51
7.2 Disposal ......................................................................................................... 51
8. Disconnection and Transportation ................................................................ 52
9. Troubleshooting .............................................................................................. 54
9.1 Troubleshooting (1) : Basic trouble ........................................................... 55
9.2 Troubleshooting (2) : ALARM ..................................................................... 55
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[Attachment Data]
Appendix 1 : Material Safety Data Sheet of Lubricant oil (JPN)
Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG)
Appendix 3 : Overhaul / Repair Request form (JPN)
Appendix 4 : Overhaul / Repair Request form (ENG)
Appendix 5 : Leak Check procedure
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