P.21
PM10U
EBARA
CORPORATION
2.5.2 Specifications
Table 2.1 Specification
Model
MODEL EV-SA20
EV-SA20-2
(1Phase 200V)
EV-SA20-3
(3Phase 200V)
Pumping Speed 1,670 L/min
Ultimate
Pressure
Gas ballast : OFF 3.0 Pa
Gas ballast : ON 5.0 Pa
Maximum Inlet Pressure Atmospheric
Maximum pure water vapor tolerance
[note 1]
100 g/hr
Connection
Gas Inlet NW40
Gas Outlet NW40
Approx.
Power
at Ultimate Pressure 0.45 kW
Maximum 1.5 kW
Current Rating 11.1 A 6.5 A
Lubrication
oil
Brand, Manufacturer BARRIERTA J100ES, NOK
Quantity 70 mL
Approx. Weight 65 kg
Power
Supply
Inlet Voltage [50/60 Hz] 1Phase, 200-240 V 3Phase, 200-240 V
Tolerable Voltage
Fluctuation [note 2]
+/- 10 %
Power Capacity 3.0 kVA
Connection IEC 60320-C20
Amphenol
C016 20C003 100 12
Circuit Protector Rating 16 A 15A
SCCR 1.0 kA 1.0 kA
Control Signal D-sub 15Pin
Cooling System Air Cooling
Ambient Temperature 5 to 40 deg C
[note 1] It is an amount of the maximum processing when the gas ballast is “ON”.
[note 2] This is tolerable voltage range, and is not steady voltage.
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