P.28
PM10U
EBARA
CORPORATION
3.2 Piping
3.2.1 Vacuum and Exhaust Piping
Connect the vacuum and exhaust pipes to the suction and exhaust flanges respectively.
Because of the narrow clearance between pump rotors, ingestion of foreign objects will prevent the
pump from operating. Observe the following cautions when making the flange connections:
(1) Remove all foreign matter from inside the piping.
(2) When connecting flanges, ensure that no dirt or dust particles adhere to the flange surfaces and
that the flange surfaces are undamaged. Provide a suitable means of preventing the ingress of
reaction by-products adhering to the pipes and foreign objects. For this purpose, a filter may be
installed.
(3) The weight of the pipes attached to the pump can cause misalignment and leaks from the flange
connections. Support the piping properly and do not apply excessive force to align flange faces.
EBARA recommends the insertion of a flexible bellows between the piping and the suction and
exhaust flanges of the pump. Length of the flexible bellows on the suction side will vary
according to the vacuum drawn. Connect without applying undue force to the flexible bellows.
(4) Please decide a part to connect to the pump exhaust so that the exhaust pressure is not beyond
atmospheric pressure.
WARNING
Check for leaks after installing the pump.
When conducting gas leak check by pressurization, do not exceed 0.05MPa as supply
pressure.
WARNING
The pump casing, inlet piping and exhaust piping become extremely hot during
operation and for some time after stopping. Be sure that pump and exhaust piping do
not come in contact with humans or inflammable substances. Do not remove the pump
cover during operation.
CAUTION
The exhaust piping made by polyvinyl chloride causes the noise through the pipe.
CAUTION
When connecting the pipes, be careful not to pinch a hand.
CAUTION
For the safety piping work, please keep sufficient space around the pump.
CAUTION
Do not connect the chamber which is not fixed to the pump.
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