EBARA EV-SA20 - Troubleshooting (1): Basic Trouble; Troubleshooting (2): ALARM

P.55
PM10U
EBARA
CORPORATION
9.1 Troubleshooting (1) : Basic trouble
Abnormal symptom Check Item Corrective Action
Circuit Protector is activated.
Incorrect wiring. Check wiring.
Short circuit. Replace or overhaul pump.
Nothing appears on the
operation panel.
No power supply to pump. Check power supply.
CP is not ON. Place CP to ON.
No wiring of power supply. Connect power connector.
Instrument failure. Replace instruments.
Pump does not start when
applying START button.
“Remote” mode has been selected. Set switch to “Local” mode.
Start-up conditions are not satisfied. Satisfy all start-up conditions.
Instrument failure. Replace instruments.
Pump does not start when
entering external “RUN” signal
input.
“Local” mode has been selected. Set switch to “Remote” mode.
Start-up conditions are not satisfied. Satisfy all start-up conditions.
Instrument failure. Replace instruments.
Pump starts suddenly. “RUN” signal was input before CP turns ON. Interrupt “RUN” signal before supplying power.
Abnormal noise.
Excessive vibration
Adjustment feet are not applied. Use the adjustment feet.
Some object is making contact with the outer
cover.
Remove the object.
The fastening screws of the outer cover have
worked themselves loose.
Tighten the fastening screws.
Parts of the pump are damaged. Replace or overhaul pump.
Vacuum pressure increase. Leak from vacuum piping. Check piping.
Rotation speed does not
increase.
Pump overload. Check pressure and exhaust pipe.
Frequency order failure. Tune instruments up.
Parts of the pump are damaged. Replace or overhaul pump.
Supplied voltage failure. Check power supply.
9.2 Troubleshooting (2) : ALARM
Abnormal symptom Check Item Corrective Action
Display appears and ALM
lamp lights.
Pump overload. Check pressure and exhaust pipe.
Parts of the pump are damaged. Replace or overhaul pump.
Display appears and ALM
lamp lights.
Supplied voltage is overflow. Input regular voltage.
Exhaust gas is back-streaming. Prevent reflux.
Display appears and ALM
lamp lights.
Supplied voltage is insufficient. Input regular voltage.
Incorrect wiring. Check wiring.
Momentary power failure occurs. Check power supply.
Instrument failure. Replace instruments.
Display appears and ALM
lamp lights.
Supplied voltage is insufficient. Input regular voltage.
Instrument failure. Replace instruments.
Display appears and ALM
lamp lights.
Exhaust gas is running back. Prevent reflux.
Parts of the pump are damaged. Replace or overhaul pump.
Pump overload. Check pump load.
Display appears and ALM
lamp lights.
Inverter overheat. Cool down inverter.
Display appears and ALM
lamp lights.
Pump overload. Check pump load.
Parts of the pump are damaged. Replace or overhaul pump.
Display appears and ALM
lamp lights.
Pump overload. Check pump load.
Parts of the pump are damaged. Replace or overhaul pump.
Display appears and ALM
lamp lights.
Pump overload. Check pump load.
Ambient temperature is high ( over 40 deg C). Reduce the ambient temperature.
Ventilation of the pump is blocked.
Open the space around the pump.
(see section 2.1.2)
Cooling fan stopped. Replace or overhaul pump.