P.13
PM10U
EBARA
CORPORATION
Contents
Environmental Basic Policies ................................................................................. 3
Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(2) Repair and Servicing ...................................................................................... 5
(3) Safety Notice ................................................................................................... 6
(4) Safety Warning Labels ................................................................................... 9
(5) Safety Interlocks ........................................................................................... 11
EC DECLARATION OF CONFORMITY ............................................................... 12
Contents ................................................................................................................ 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check ........................................................................................ 15
1.2 Environmental Concerns ............................................................................. 16
2. Product Description ........................................................................................ 17
2.1 Outline ............................................................................................................ 17
2.1.1 Pump Module ......................................................................................... 17
2.1.2 Cooling Fan ............................................................................................ 17
2.1.3 Exhaust ................................................................................................... 17
2.2 Control System ............................................................................................. 17
2.2.1 Alarm Control System ........................................................................... 17
2.3 Movement ...................................................................................................... 18
2.3.1 Preparation ............................................................................................ 18
2.3.2 Moving Method ...................................................................................... 18
2.4 Release and shut off residual internal energy .......................................... 19
2.4.1 Electrical Power – Lockout and Tagout ............................................. 19
2.4.2 Returning to Service ............................................................................. 19
2.5 Detailed Specification .................................................................................. 20
2.5.1 Model Description ................................................................................. 20
2.5.2 Specifications ........................................................................................ 21
2.5.3 Outline Drawing ..................................................................................... 22
2.5.4 Performance Curve ............................................................................... 23
2.5.5 System Flow .......................................................................................... 24
3. Installation ........................................................................................................ 25
3.1 Movement and Fixation................................................................................ 25
3.1.1 Location .................................................................................................. 25
3.1.2 Caster and adjustment foot ................................................................. 25
3.1.3 Pump Anchoring (Option) .................................................................... 26
3.2 Piping ............................................................................................................. 28