EBARA EV-SA20 - Page 35

P.34
PM10U
EBARA
CORPORATION
Table 3.5 Signal contacts
IN
OUT
Pump side circuit Customer’s connection
Pump side circuit Customer’s connection
12
8mA
24V DC
9
1
4
8mA
Open collector Dry contact
2
10
12
8mA
24V DC
9
11
4
8mA
Open collector Dry contact
22
10
A
20kΩ
7
15
DC 0-10 V
A
20kΩ
AA
20kΩ
7
15
DC 0-10 V
14
6
DC30V 10mA - 1A
Min. Load: DC5V, 10mA
Surge suppressor
AC250V 10mA - 1A
14
6
DC30V 10mA - 1A
Min. Load: DC5V, 10mA
Surge suppressor
AC250V 10mA - 1A
11
3
Open collector
DC5-48V
50mA or less
11
3
Open collector
DC5-48V
50mA or less
8mA