P.49
PM10U
EBARA
CORPORATION
(2) After you have waited until the internal pump pressure returns to atmospheric (normal) pressure,
remove the plug from the oil-inlet. (See Fig. 6.2)
(3) Check the oil level from the sight-glass of the oil level gauge. Then add the lubricant oil so that the
level is the upper level. (See Fig. 6.2 and 6.3)
(4) After you have checked that there are no depositions and fragments adhering to the O-ring
attached to the plug, close the oil-inlet.
(5) Be sure to check the gas leak after supplying the lubricant oil.
WARNING
Be sure only to use the lubricant oil listed in specification table 6.1
WARNING
When the lubrication oil level exceeds the upper limit, the oil may leak to the pump side.
Thus, be sure no to exceed the upper limit line when adding the oil.
WARNING
When the lubrication oil level is lower than the lower limit, serious failure may be caused.
If you find out the shortage, add the oil immediately.
Oil filler Inlet
Oil level gauge
Oil drain port
Fig. 6.2 oil filler inlet, oil level gauge,
and oil drain port positions
WARNING
Waste oil shall be disposed of by industrial waste disposal dealer in accordance with
Material Safety Data Sheets. (Appendix 1, 2)
Lower level
Upper level
Fig. 6.3 oil level gauge
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