EBARA EV-SA20 - Page 73

APPENDIX 6 Typical Hazardous Gas Information
1. Etching process
Gas
Combustion
Support
Flammable Toxic Corrosive
Global
Warming
Allowable
Level*
NF
3
○ ○ ○
10ppm
HF
○ ○
3ppm
Cl
2
○ ○ ○
0.5ppm
BCl
3
○ ○
5ppm
as HCl
HBr
○ ○
3ppm
Br
2
○ ○
0.1ppm
CF
4
○
N/A
CHF
3
○
N/A
C
2
F
6
○
N/A
*Allowable level is specified as TLV of ACGIH.
2. LP-CVD
Gas
Combustion
Support
Flammable Toxic Corrosive
Global
Warming
Allowable
Level
SiH
2
Cl
2
○ ○ ○
5ppm
as HCl
SiH
4
○ ○
5ppm
Si
2
H
6
○ ○
5ppm
Si(OC
2
H
5
)
4
(TEOS)
○
10ppm
As(OC
2
H
5
)
4
(TEOA)
○ ○
0.01mg/m3
as As
NH
3
○ ○ ○
25ppm
H
2
○
4% LEL*
NF
3
○ ○ ○
10ppm
ClF
3
○ ○ ○
0.1ppm
*LEL : Lower Explosion Level
3. Ion-implant
Gas
Combustion
Support
Flammable Toxic Corrosive
Global
Warming
Allowable
Level
AsH
3
○ ○
0.05ppm
B
2
H
6
○ ○
0.1ppm
PH
3
○ ○ ○
0.3ppm
BF
3
○ ○
1ppm